(강하넷) www.kangha.net 강하넷 진단 Report ◎ : 매우 잘함 ○ : 잘함 △ : 보통 X : 현재 불가능 공정 별 현수준 대표 품목 대책 CVD ◎ (C) PLATE PERF COMMON (C) PLATE, BLOCKER (C) UPPER DOME (C) CERMIC COVER (C) COLLER MIN CONTACT 200 (C) SHIELD (C) WAFER LIFT (C) PUMPING PLATE (C) PLATE WINDOW ITVSERT (C) ISOLATOR CERAMIC PRO 200MM (C) CERAMIC PUMPING INSERT TOP (C) PRODUCER FACE PLATE (C) CERAMIC PUMPING INSERT MID (C) CERAMIC PUMPING INSERT BTM (C) BLOCKER (C) GAS BOX EXTENSION (C) Manifold (C)SHIELD(P-5000) (C) CERAMIC FORK ASSY ○ (C) VRB SHIELD 8" 강하넷 진단 Report ◎ : 매우 잘함 ○ : 잘함 △ : 보통 X : 현재 불가능 공정 별 현수준 대표 품목 대책 METAL ◎ (C) Altus Shower Head (C) MOER RING JOEDIA (C) ONE BODY CLAMP (C) SHIELD CYLINDER (C) DARK SPACE SHIELD (C) SHIELD DEPOSITION (C) SHIELD SUPPORT (C) SHIELD DARK SPACE (C1) SHIELD DARK SPACE (C) SHIELD CHAMBER BOTTOM C) CAP TABLE SHELD DIFFUSION ◎ (C) QUARTZ TUBE
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